SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS is a manufacturer of etch, deposition and thermal equipment for the semiconductor industry, including ICP, PVD, PECVD, HF etch, XeF2 etch and Si DRIE
SPTS' Xactix vapour etch systems use XeF2 vapour to isotropically dry etch sacrificial silicon, without stiction and with high selectivity to other materials.
SPTS' Xactix vapour etch systems use XeF2 vapour to isotropically dry etch sacrificial silicon, without stiction and with high selectivity to other materials.