Ultrafast atomic layer deposition - SoLayTec
Leading research institutes recently reported about the superior solar cell passivation properties of thin aluminum oxide layers grown by Atomic Layer Deposition (ALD). Yet, so far no cost-effective production tool was available for high-volume ALD deposi
SoLayTec, High, Speed, Spatial, Atmospheric, Atomic, Layer, Deposition, ALD, Solar, Backside, passivation, Al2O3, Alumina, deposition, production, equipment, i-PERC, p-Pasha, AlOx,
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